Under-one-roof type nano/micro-fabrication platform
(Kyoto University)

Nanotechnology Hub in Kyoto University offers the under-one-roof type nano/micro fabrication environment to build up knowledge for generating new ideas and technology network for worldwide researchers and engineers. More than eighty kinds of forefront equipment for nano/micro fabrication and characterization are offered to users, and eight dedicated and highly skilled technical engineers provide technical instruction, advice of process conditions and advanced technological issues.

Contact to this institute

【Contact details】
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About this institute

  1. Materials and substrate size:
    The nano/micro fabrication line can handle various kinds of substrate and thin-film materials as well as conventional silicon, and can process 4 and/or 6 inch wafers to get trial fabrication data by using the equipment groups of nano-lithography, nano-material processing and analyses.
  2. Open-door policy:
    The nano/micro fabrication platform was established to support every industry-academic-government researcher or engineer by a simple application procedure.
  3. Clear charge system:
    Using fees per an hour or a day are clearly indicated for individual instruments on our homepage for easy estimation of the charge being billed. 
  4. Equipment operation:
    Users can operate their request equipment by themselves with the support by platform staffs, so that users can optimize their experimental schedule depending on their progress. 
  5. Other technical services:
    Technological consultation and proxy service by the platform staff are available.
Yellow roomClean room
Fabrication analysis roomOffice for users (TV remote discussion system)


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Nanotechonology Hub, Kyoto University
Yoshida-honmachi, Sakyo, Kyoto 606-8501, Japan
 +81-(0)75-753-5231,  FAX +81-(0)75-753-5650
  (*Please replace "(at)" with @.)