Comprehensive technical support for research projects on thin-film preparation and nano-structure/nano-device fabrication
(Nagoya University)

Nagoya University offers various supports for nano-technology, such as thin film preparation of semiconductor, magnetic, dielectric, ceramic and organic materials and their nano-materials, nano-structures and nano-devices using micro and nano lithography and plasma processing.

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【Contact details】
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About this institute

Nagoya University has many advanced facilities to prepare and process various electronic materials, i.e. semiconductor, magnetic, dielectric, ceramic and organic materials, and also has technical know-how to develop new kind of devices using such materials. The university offers a wide range of support for nano-technology research and development, such as nano-material and thin film processing using magnetron sputtering and molecular beam epitaxy, nano-structure patterning using electron beam and photo lithography, micro and nano-device processing and material analysis using X-ray photo-electron spectrometer, scanning electron microscope, X-ray diffractometer and atomic force microscope. Typical support provided at our facilities is as follows.

- nano-scale and/or micro-scale lithography and patterning
- nano interconnection and nano electrode processing
- nano dot and nano structure alignment
- plasma etching and surface treatment
- electronic and photonic device processing
- MEMS and NEMS technology
- thin film preparation of semiconductor, magnetic, metallic, ceramic and organic materials.
Strained-Ge/SiGe micro pillar
structure formed on Si substrate
Three dimensional microfluidic  
network with circular cross-section
Vertically grown nano-graphene (Carbon nano-wall)Micro magnetic sensor using GMR effect




EcoTopia Science Institute, Nagoya University
Furo-cho, Chikusa-ku, Nagoya, Aichi 464-8603, Japan
 +81(0)52-789-3303, FAX +81(0)52-789-3153
  (*Please replace "(at)" with @.)