The Nanofabrication Platform Consortium (NFPC)
(Leading Institute of the Plaform:Kyoto University)

The Nanofabrication Platform Consortium (NFPC) contributes to enhance users' R&D capability in the nano- and micro-scale regions to a world-class level, through the use of shared leading-edge facilities of 16 open Institutes. Each institute has specific areas of technical excellence and knowledge, and they are geographically distributed in Japan.
【Contact details】
  (*Please replace "(at)" with @.)


About this platform

Over 1,000 applicants use the NFPC in a year, then they can start their R&D without any investment in equipment and/or without time delay by choosing the over 400 shared equipment. The NFPC also contributes to nurturing innovation through interdisciplinary researches and furthermore to promoting the commercialization of the innovation. The NFPC paves the users' way to the support; 
  • By using the "one-stop service", users can find the institute to meet their requirements. The inquiry portal can be found at . Coordinators help you to contact the institute.
  • Academia and industry researchers who are not familiar with nano- and micro-scale fabrication can learn the technology by participating in the seminars held by the NFPC. Some seminars contain training programs in which participants can operate the most advanced equipment.
  • The 46 direct-writing lithography systems are available in the NFPC. Users can make the functional device without any preparation of masks. The high throughput electron beam lithography systems realized by character projection technology are open to users in Kansai and Tokyo district.
Classroom lecture Training program in a clean room


  • Electron beam lithography system (both point electron beam and character projection type)
  • Stepper
  • RIE (Reactive Ion Etching) system
  • Sputtering system
  • CVD (Chemical Vapor Deposition) system
  • Focused ion beam system
  • Laser lithography system
  • Material analysis/evaluation system
  • Surface profiler, Surface inspection system ( SEM, SPM )
  • List of related institutes


    【Leading Institute of the Platform】

     The representative office of the Nanofabrication Platform Consortium, Kyoto University
    Research Bldg. No.1/Project Lab.301, Yoshida-Honmachi, Sakyo-ku, Kyoto 606-8501, Japan
      +81-(0)75-753-5656, FAX +81-(0)75-753-5658


     Office for the promotion of nanotechnology collaborative research, Hokkaido University
    03-305 in Sosei, Hokudai, N21W10 Kita-ku, Sapporo, Hokkaido 001-0021, Japan
     +81-(0)11-706-9340, FAX +81-(0)11-706-9376

     Center for Integrated NanoTechnology Support (CINTS), Tohoku University
    Nishizawa Memorial Research Center
    519-1176, Aramaki-Aza-Aoba, Aoba-ku, Sendai, Miyagi 980-0845, Japan 
     +81-(0)22-229-4113, FAX +81-(0)22-229-4116

     NIMS Nanofabrication Platform Office
    1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan

     National Institute of Advanced Industrial Science and Technology Nano-Processing Facility (NPF)
    Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

     University of Tsukuba, Academic Service Office for the Pure and Applied Sciences Area
    Hiromasa Kobayashi
    1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan

     VLSI Design and Education Center, the University of Tokyo
    Dr. Yoshio Mita c/o Ms. Watanabe
    Takeda Buiding 301, 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-0032, Japan
     TEL/FAX +81-(0)3-5841-1506

     Institute for Nanoscience & Nanotechnology, Waseda University
    120-5, Research and Development Center
    513 Wasedatsurumaki-cho, Shinjuku-ku, Tokyo 162-0041, Japan

     Quantum Nanoelectronics Research Center, Tokyo Institute of Technology
    2-12-1-S9-2, O-okayama, Meguro-ku, Tokyo 152-8552, Japan

     EcoTopia Science Institute, Nagoya University
    Furo-cho, Chikusa-ku, Nagoya, Aichi 464-8603, Japan
     +81(0)52-789-3303, FAX +81(0)52-789-3153

     Research Supporting Group, Toyota Technological Institute
    Katsuji Yamashita
    2-12-1 Hisakata, Tenpaku-ku, Nagoya, Aichi 468-8511,Japan
     +81-(0)52-809-1725, FAX +81-(0)52-809-1721

     Nanotechonology Hub, Kyoto University
    Yoshida-honmachi, Sakyo, Kyoto 606-8501, Japan
     +81-(0)75-753-5231, FAX +81-(0)75-753-5650

     Nanotechnology Open Facilities, 
    The Institute of Scientific and Industrial Research (ISIR), Osaka University
    Mihogaoka 8-1, Ibaraki, Osaka 567-0047, Japan

     Support Office for Nanotechnology, Center for Social Collaboration and Intellectual Property, 
    Kagawa University
    2217-20, Hayashi-cho, Takamatsu, Kagawa 761-0396, Japan

     Research Institute for Nanodevice and Bio Systems, Hiroshima University
    1-4-2 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
    +81-(0)82-424-6265, FAX +81-(0)82-424-3499

     Support Laboratory of Nano-Fabrication, 
    Organization for Research Initiatives, Yamaguchi University
    2-16-1 Tokiwadai, ube-shi, yamaguchi, 755-8611, Japan
     TEL/FAX +81-(0)836-85-9993

     Kitakyushu Foundation for the Advancement of Industry, Science and Technology
    1-5 Hibikino, Wakamatsu-ku, Kitakyushu-shi, Fukuoka 808-0135, Japan
     +81-(0)93-695-3600, FAX +81-(0)93-695-3609