Institute for Nanoscience & Nanotechnology at Waseda University: with a focus on nano-fabrication for various materials and substrate sizes.
(Waseda University)

We provide technical support service in the field of nanofabrication.  The shared facilities are brought together in the "nanotechnology research center" and your research is supported by the staff members with extensive experience in research and development in private companies.  Through such a process, we will contribute to construction of the research infrastructure of nanotechnology, and promote industrial-academic-government cooperation and combined research.
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About this institute

Waseda University has equipped facilities and equipments since 2001, and established "Nanotechnology Research Center" to promote research and education in nanotechnology, by utilizing various public funds, such as, high-tech research center, COE, nanotechnology network (nanonet), and the low-carbon network (LCnet).  

 In addition, Waseda University founded the "Institute of Nanoscience & Nanotechnology" for administration.  It supports private companies and public research organizations as well as within the university, as an open infrastructure of nanotechnology, based on the knowledge obtained through the studies in the research center.

The know-how obtained through operative achievements to date will be leveraged for utilization in the Nanofabrication Platform Consortium.  We will execute "support of nanofabrication using electrochemical reaction" and "support of nanofabrication using green process and device characterization" with a focus on nano-fabrication for various materials and substrate sizes.

Polystyrene beads with a low acceleration voltage by FIB-SEM

FIB-SEM operation50nmUV nano imprint pattern
RHEEDHF treated Cu-based metallic glass


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Institute for Nanoscience & Nanotechnology, Waseda University
120-5, Research and Development Center
513 Wasedatsurumaki-cho, Shinjuku-ku, Tokyo 162-0041, Japan
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