【公開日：2025.06.10】【最終更新日：2025.05.12】
課題データ / Project Data
課題番号 / Project Issue Number
24NM5157
利用課題名 / Title
Development of Thermoelectric Materials
利用した実施機関 / Support Institute
物質・材料研究機構 / NIMS
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）加工・デバイスプロセス/Nanofabrication
【重要技術領域 / Important Technology Area】（主 / Main）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion（副 / Sub）-
キーワード / Keywords
熱電材料/ Thermoelectric material,X線回折/ X-ray diffraction,電子顕微鏡/ Electronic microscope,リソグラフィ/ Lithography,走査プローブ顕微鏡/ Scanning probe microscope,膜加工・エッチング/ Film processing/etching
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
森 孝雄
所属名 / Affiliation
物質・材料研究機構
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Kushal Mehrotra,Xinyuan Wang,BIN DHUBAN Salem Omar Abdullah,Senados Kenneth,Florent Baudouin
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
NM-212：卓上型粉末回折計_Cu_ASC_NC1
NM-648：FE-SEM+EDX [SU8000]
NM-638：水蒸気プラズマ洗浄装置 [AQ-500 #2]
NM-604：マスクレス露光装置 [DL-1000/NC2P]
NM-645：ICP-RIE装置 [CE300I]
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
(NM-212) XRD was used to perform the phase analysis of the synthesized compounds.(NM-648) FESEM+EDS was used to analyze the microstructre and compositions of inorganic semiconducting thermoelectric materials.NM-638[AQ-500 #2], NM-604 [DL-1000/NC2P] and
NM-645 [CE300I] were used for microfabrication of TE device.
実験 / Experimental
(NM-648) In this work, the surface morphology of the bulk samples was analyzed using scanning electron microscopy (SEM) (Hitachi High-Tech/SU-8000). The surface of the film is polished well before using special micron sized particles diamond solutions before being transferred to the SEM machine. The accelerating voltage was set between 10-15KV. By collecting and analyzing signals generated by the interaction of electron beams with surface atoms, images depicting the distribution of surface morphology and composition can be generated.
結果と考察 / Results and Discussion
The microstructure and grain growth of the synthesized MnB4 samples (Fig. 1-4) were analyzed using FESEM-SU8000 (NM-648). The SEM images revealed that sample synthesized with low amount of excess boron showed enhanced densification (Fig. 1), while boron-rich samples showed porous microstructure (Fig. 2-4). all samples showed equiaxed grains.
図・表・数式 / Figures, Tables and Equations
Fig.1 SEM image of synthesized MnB4 with low amount of boron
Fig.2 SEM image of synthesized boron-rich MnB4
Fig.3 SEM image of synthesized boron-rich MnB4
Fig.4 SEM image of synthesized boron-rich MnB4
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
-
Xinyuan Wang, Process influence on thermoelectric performance of digenite (Cu1.8S) and its underlined thermal instability, Ceramics International, 51, 10443-10452(2025).
DOI: 10.1016/j.ceramint.2024.12.477
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- F. Baudouin, C. Bourges, T. Duchesne, F. Grasset, J.-F. Halet, and T. Mori, Anisotropic transport properties of Cr2TiAlC2 MAX phase, IWAMSN2024
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件