【公開日：2025.06.10】【最終更新日：2025.05.01】

課題データ / Project Data

課題番号 / Project Issue Number

24UT0305

利用課題名 / Title

DLC膜の構造的特性に関する研究

利用した実施機関 / Support Institute

東京大学 / Tokyo Univ.

機関外・機関内の利用 / External or Internal Use

外部利用/External Use

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）マルチマテリアル化技術・次世代高分子マテリアル/Multi-material technologies / Next-generation high-molecular materials

キーワード / Keywords

Diamond-like carbon; Thin film; Tribology,コンポジット材料/ Composite material,電子顕微鏡/ Electronic microscope,高品質プロセス材料/技術/ High quality process materials/technique,集束イオンビーム/ Focused ion beam

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

べ スミン

所属名 / Affiliation

東京都市大学 機械工学科内燃機関工学研究室

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

寺西亮佑

利用形態 / Support Type

（主 / Main）技術補助/Technical Assistance（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

UT-156：集束イオンビーム加工観察装置（FIB）
UT-006：ハイスループット電子顕微鏡

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

The structure of diamond-like carbon (DLC) was examined using transmission electron microscopy (TEM). The TEM analysis revealed that the DLC exhibits an amorphous structure, confirming the absence of long-range crystalline order.

実験 / Experimental

The structural characterization of DLC coatings was conducted using transmission electron microscopy (TEM; JEM-2800, JEOL Ltd., Japan) operated at an accelerating voltage of 200 kV. Samples were prepared through focused ion beam (FIB; JIB-PS500i, JEOL Ltd., Japan) milling to create thin lamellae suitable for TEM observation. To prevent structural damage during FIB processing, a protective carbon layer was deposited locally on the DLC surface. The extracted lamella was mounted on a copper grid and further thinned to achieve electron transparency.

結果と考察 / Results and Discussion

TEM observations revealed that the DLC sample exhibited uniform contrast without distinct lattice fringes, suggesting an amorphous nature. HRTEM images confirmed the absence of long-range atomic ordering typically observed in crystalline materials. The lack of crystalline domains indicates that the DLC consists primarily of disordered carbon networks. This amorphous structure is characteristic of DLC films, where sp² and sp³ hybridized carbon atoms form a random network without periodicity. The observed amorphous structure contributes to the mechanical properties of DLC, such as high hardness and low friction, commonly associated with disordered carbon films.Additionally, EDS analysis confirmed the presence of carbon as the dominant element, with negligible contamination, validating the structural observations. The combination of HRTEM imaging and SAED analysis provides a comprehensive understanding of the amorphous nature of DLC, consistent with previous studies on similar carbon-based materials.

図・表・数式 / Figures, Tables and Equations

Fig. 1. a transmission electron microscopy (TEM) image of the deposited hydrogenated diamond-like carbon (a-C:H) film, revealing its nanoscale structural characteristics. The absence of any discernible crystalline lattice patterns confirms the amorphous nature of the DLC film, with no evidence of graphitic or diamond-like nanocrystalline inclusions

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件