【公開日：2025.06.10】【最終更新日：2025.05.12】

課題データ / Project Data

課題番号 / Project Issue Number

24TU0190

利用課題名 / Title

Fabrication of Cu-Mo composite by LMD and thermal properities

利用した実施機関 / Support Institute

東北大学 / Tohoku Univ.

機関外・機関内の利用 / External or Internal Use

内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion

キーワード / Keywords

Liquid metal dealloying, Metallic composite,熱電材料/ Thermoelectric material,高品質プロセス材料/技術/ High quality process materials/technique,MEMS/NEMSデバイス/ MEMS/NEMS device,集束イオンビーム/ Focused ion beam

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

ソン ルイルイ

所属名 / Affiliation

東北大学金属材料研究所

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

竹中佳生

利用形態 / Support Type

（主 / Main）技術代行/Technology Substitution（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

TU-507：集束イオンビーム加工装置
TU-508：集束イオンビーム加工装置

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

The Mo@Cu composite sample is fabricated and tailored by liquid metal dealloying (LMD) technique for optimizing machenical and thermal properties. Fine observation by HRTEM/STEM is required for fabricated sample to investigate the effect of microstructure on the above properties. Here, the Focused ion beam (FIB) is applied to cut the target area for further HRTEM/STEM observation.

実験 / Experimental

Focused ion beam (FIB) processing of Mo@Cu composite sample.

結果と考察 / Results and Discussion

Focused Ion Beam (FIB) processing was successfully employed to prepare cross-sectional lamellae of the Mo@Cu composite for detailed microstructural analysis. The dual-phase nature of the sample, comprising Mo phase interlocked with Cu phase, posed challenges due to differential sputtering rates and ion beam-induced damage. Careful optimization of the milling parameters minimized curtaining effects and preserved interface integrity. High-resolution SEM imaging of the cross-section revealed sharp Mo–Cu interfaces, with minimal interdiffusion or reaction layers, suggesting thermal stability during processing.  Notably, no significant amorphization or surface roughening was observed in either phase. FIB is a reliable technique for site-specific preparation of Mo@Cu composites, enabling subsequent characterization in TEM.

図・表・数式 / Figures, Tables and Equations

Fig. 1 FIB cutting of target area.

Fig. 2 FIB cutted sample settled on holder.

Fig. 3 FIB processing for final TEM characterization.

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件